Chemical vapour deposition of Ir-based coatings: chemistry, processes and applications
نویسندگان
چکیده
منابع مشابه
CHEMICAL VAPOUR DEPOSITION OF Al-CONTAINING TiC - AND Ti(O,C) - HARD COATINGS
For the Ti-Al-0-C-system it is shown that it is possible to produce good quality deposits of both single-phase TiAlOC or A1203-layers and heterogeneous layers of TiAlOC and A1203 under normal pressure-CVD-conditions using a reaction gas mixture of TiC14, AlC13, H2 and a CO/C02-mixture.
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Boron included aluminium nitride (B-AlN) thin films were synthesized on silicon (Si) substrates through chemical vapour deposition ( CVD ) at 773 K (500 °C). tert-buthylamine (tBuNH2) solution was used as nitrogen source and delivered through gas bubbler. B-AlN thin films were prepared on Si-100 substrates by varying gas mixture ratio of three precursors. The structural properties of the films ...
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ژورنال
عنوان ژورنال: RSC Advances
سال: 2015
ISSN: 2046-2069
DOI: 10.1039/c5ra03566j